Heater for substrate processing apparatus



FIG. 1 is a front, bottom and right side perspective view of a heaterfor substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof:

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view thereof taken in the direction of line8-8 in FIG. 6.

The dot-dash broken lines and evenly spaced broken lines immediatelyadjacent to the shaded areas represent the bounds of the claimed design,while all other evenly spaced broken lines are directed to environment;the broken lines form no part of the claimed design. In addition, thedot-dot-dash broken line arrows in the FIG. 6 view is used to identifythe cross-section views, are for reference purposes only, and form nopart of the claimed design.

CLAIM We claim the ornamental design for a heater for substrateprocessing apparatus, as shown and described.